Interferometer encoders provide the ultimate accuracy in linear position feedback. Renishaw is a leader in the field of homodyne interferometry with almost 25 years of experience in machine metrology applications as well as system technology.
The HS10 long range laser encoder has been in use since 1994 for axis measurement up to 60 m. From 2001 it was joined by the RLE laser encoder series, using a unique and patented "remote" laser source and optical fibre linked head. The system has seen regular updates and the addition of optional laser sources, interferometer configurations, and real-time quadrature compensation as well as various signal interfaces. The RLE system is in now in use with many global manufacturers of semiconductor process machinery as well as numerous other short range applications (less than 4 m) where its features and capabilities offer the advantages of interferometry where they were previously not practicable.
