SEM-Raman system

• Morphology and mean atomic number
  from SEM (SEI and BEI)
  
• Elemental composition
  from EDS analysis
  
• Chemical composition and identification
  from Raman spectroscopy
  
• Physical structure
  (crystallographic and mechanical data) from Raman spectroscopy
  
• Electronic and physical structure
  from CL and PL spectroscopies

Applications

These include:

• Materials science
  corrosion studies, electronic materials, polymers, composites
• Semiconductors
  particle contamination identification
• Pharmaceuticals
  coating, filler and excipient identification, polymorphism studies
• Forensic science
  identification of explosives, drugs, fibres, pigments

Advantages

• Simultaneous SEM and Raman spectroscopy
  Features of interest can be easily located using the SEM. These can then be identified rapidly and unambiguously using Raman spectroscopy.
• EDS and white light images from the same sample position
  EDS spectra, maps, and white light images can be acquired from the same sample position as the SEM image and the Raman spectra.
• Cathodoluminescence (CL) and photoluminescence (PL) spectroscopies
  The Raman collection optics are fully compatible with both PL and CL spectroscopies. The former uses a laser as the excitation source, the latter the electron beam. Each technique can reveal both electronic and physical information about the sample, and CL can be sensitive to very subtle changes in composition and residual strain.