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TONiC™ UHV incremental encoder system with RKLC20-S linear scale

Features

  • Readhead size: 35 x 13.5 x 10 mm
  • Resolutions to 1 nm
  • Speed up to 10 m/s
  • Analogue or digital outputs
  • Ultra-low Sub-Divisional Error (SDE): typically < ±30 nm
  • Customer-selectable optical IN-TRAC™ reference mark

Benefits

  • Ultra-High Vacuum (UHV)
  • Narrow 6 mm wide scale suitable for space constrained applications
  • Substrate mastered scale giving improved metrological performance
  • Super-compact encoder with dynamic signal conditioning for improved motion control
  • Cut to length convenience
  • High dirt and solvent immunity
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What is TONiC UHV?

TONiC UHV brings Renishaw's super-compact, non-contact encoder system to Ultra-High Vacuum applications offering customers improved motion control.

TONiC offers speeds up to 10 m/s and, combined with the Ti interface, resolutions down to 1 nm for both linear and rotary applications. TONiC systems are quick and simple to install with wide set-up tolerances and calibration at the push of a button. TONiC's dynamic signal processing gives improved signal stability with ultra-low sub-divisional error of typically <±30 nm to help realise superior motion control performance.

What is RKLC20-S scale?

RKLC20-S is a narrow, low profile stainless steel tape scale featuring 20 µm pitch incremental graduations and IN-TRAC customer selectable reference marks. It is accurate to ±5 µm/m and available in lengths up to 20 metres (> 20 m on request). The RKLC20-S is mastered to the machine substrate giving improved metrological performance when the scale ends are rigidly fixed to the substrate.

Why choose this encoder system?

Ultra-High Vacuum (UHV)

TONiC UHV readheads take standard TONiC outstanding performance and deliver it in a readhead that has been designed and constructed using UHV compatible materials and processes making it suitable for UHV conditions down to 10-10 Torr.

The range of TONiC UHV encoders and accessories are constructed from vacuum-compatible materials and adhesives to give low outgassing rates and proven clean residual gas analysis (RGA) making them suitable for many applications including wafer handling / testing, scientific instruments, spectroscopy, vacuum inspection equipment and many more.

Exceptional metrology

The TONiC encoder features Renishaw's market-proven filtering optics and advanced signal processing. Auto Gain Control (AGC) and Auto Offset Control (AOC) technologies reduce analogue signal noise and digital jitter within the readhead.

TONiC encoders deliver exceptionally low signal output jitter of <±0.5 nm RMS and low Sub-Divisional Error (SDE) of <±30 nm, enabling systems to hold position better and generate less heat in linear motor applications. Low jitter also enables smoother velocity control in high-precision applications operating at low speeds.

Narrow, robust and versatile scale

RKLC is a robust, 6 mm wide stainless steel encoder tape scale with a thickness of 0.15 mm. This allows the scale, when rigidly fixed to a machine axis, to become ‘mastered' to the machine substrate, matching its thermal expansion coefficient and behaviour. Differential movement between the scale and the machine is thus minimised.

Index positions are provided by IN‑TRAC optical reference marks which are directly embedded into the incremental scale markings to enable auto‑phasing. This compact scale design facilitates encoder installation in space constrained applications. RKLC tape scale also combines ±5 µm/m accuracy with the mechanical and chemical ruggedness of stainless steel, easy coiling and 'cut to length' convenience.

Interface options

TD (dual resolution) interface

  • Selectable dual-resolutions quadrature output. Ti interface (square)
  • Ideal for applications that require high speed movement combined with finer precision motion.

DOP (dual output) interface

  • Provides simultaneous digital quadrature and 1 Vpp signals.
  • Designed for applications requiring one or more operations to be synchronised with a motion axis.TONiC Dual Output (DOP) interface

Optional diagnostic kit

TONiC™ diagnostic kit (software and hardware)

TONiC diagnostic software can be used to optimise the installation of TONiC encoders and provide a quick and comprehensive system calibration. The software must be used in conjunction with the TONiC diagnostic hardware which can be purchased from Renishaw using part number A-9411-0011. The hardware is connected to the PC via the USB cable (provided in the kit) or in-line with the customers' electronics.

Find out all about the TONiC diagnostic kit.

Technical specifications

Measuring standard

Narrow stainless steel tape scale with self-adhesive backing tape, for mounting directly to a substrate

Readhead size (LxWxH)

35 mm x 13.5 mm x 10 mm

Scale pitch

20 μm

Coefficient of thermal expansion

Matched to substrate material when scale ends are rigidly fixed to the substrate

Accuracy grade at 20 °C

±5 μm/m

Reference mark

IN-TRAC reference marks directly embedded in the RKLC-S

Selector magnet used to identify chosen reference marks

Limit switches

Dual or single limits (select at time of order)

Scale length

Up to 20 m (> 20 m on request)

Scale form (H x W)0.15 mm x 6 mm including adhesive

Maximum speed

Analogue

Digital

(See data sheet for details)

Up to 10 m/s at -3 dB

Up to 10 m/s

Sub-Divisional Error (SDE)

Typically < ±30 nm

Dynamic signal control

Real time signal conditioning including Auto Gain Control (AGC) and Auto Offset Control (AOC) for optimised performance during operation

Incremental signals

Analogue

Digital


1 Vpp (20 μm period)

Resolutions from 5 μm to 1 nm

Electrical connection

0.5 m, 1 m, 1.5 m, 3 m, 5 m and 10 m cable lengths with mini connector (connects direct to TONiC interface)

Power supply

5 V ±10%, < 100 mA (analogue system), < 200 mA (digital systems) (unterminated)

Vibration (operating)

100 m/ s2 max @ 55 Hz to 2 000 Hz

Shock (non-operating)

500 m/s2, 11 ms, ½ sine, 3 axes

Operating temperature (system)

0 °C to +70 °C

Bake-out temperature (non-operating)120 °C (Readhead and scale only)

Sealing

Readhead: IP20

Interface: IP20

Cable constructionTinned copper braided single screen, FEP core insulation

Refer to data sheets for full details.