Interferometric laser encoders
Renishaw offers a range of next-generation interferometric laser encoders, also known as displacement measuring interferometers. Discover how our laser encoder systems meet the advanced motion control demands of semiconductor manufacturing equipment.
Designed for high-accuracy motion control applications
Our next-generation Renishaw laser encoder (RLE) systems deliver high-performance solutions for position measurement in advanced engineering applications. Built on decades of innovation, our laser encoders, along with a range of interfaces, offer a robust solution for high-accuracy displacement feedback in demanding motion control applications.
Our laser encoder systems are trusted by global leaders in semiconductor manufacturing, scientific research and precision manufacturing. They deliver the accuracy and frequency stability needed to meet the most demanding specifications.
Our older, legacy products - the RLE10 and RLE20 laser encoder systems - are not recommended for new designs. Find our suggested alternative solutions and contact us today for manufacturing support.
Expand your capabilities with our laser encoders and interfaces
The RLE100, RLE200 and RLE300 systems are advanced homodyne interferometric laser encoders specifically designed for position feedback applications.
High-speed interfaces provide high resolution position feedback in various digital formats. Diagnostics provide real-time system information.
Why choose Renishaw's laser encoders?
Laser encoders provide linear or angular position measurement with high resolution and low cyclic error (Sub-Divisional Error). They combine the measurement performance of a displacement interferometer with the ease of use and installation of traditional tape or glass scale encoders.
Accurate measurement
Ultimate precision from ultra-high frequency stability, low positional noise and automatic Sub-Divisional Error (SDE) correction.
Flexible configuration
Configure your ideal system set-up and output with ease using our modular system design and intuitive software.
Easy set-up
Compact and robust, the RLE system's optical fibre technology and integral beam steerers reduce installation time to a simple bolt down and dial in process.
What is a laser encoder?
A laser encoder is a displacement measurement system that uses laser interferometry to provide precise position feedback for motion control. These systems are ideal for applications where nanometre-scale accuracy, system flexibility and environmental resilience are essential, such as precision XY stages.
Laser encoders explained
We are dedicated to simplifying laser encoder interferometry and understand that selecting the right system can be complex.
Explore how Renishaw's RLE laser encoder systems use a remote laser source to deliver enhanced metrology and improve your processes.
Examples of laser encoder applications
Lithography
Laser encoders are well suited to provide precision position feedback for direct-write lithography processes, both laser write systems in air and electron-beam (e-beam) systems in vacuum.
Wafer inspection
SEM-based wafer inspection processes benefit from differential interferometer laser encoders which measure the point of interest relative to the electron column.
Wafer packaging
Plane mirror interferometer laser encoders provide the robust high-resolution position feedback essential for demanding alignment processes in wafer packaging applications.
Application support and custom solutions
Renishaw provides training and technical support for your application, no matter where you and your customers are.
We work directly with you to develop product variants and bespoke accessories to suit your applications.
Service and repair
Renishaw offers a full range of service options to maintain optimal performance and support compliance with quality assurance and business requirements.
All laser encoder repairs are completed by our expert technicians at our Service Centres. In addition to standard repairs, "Repair by Exchange" (RBE) units are also available for several items as a cost-effective repair option.
Quality and conformance
When you buy an interferometric laser encoder and its accessories from Renishaw, you are buying into a proven track record of assured quality, and an ISO 9001 compliant quality management system.
Ensuring customer confidence requires quality assurance and a robust traceability record. Our RLE laser encoder systems can be supplied with documentation that demonstrates the quality and reliability of your capabilities.
Discover our range of open and enclosed optical, inductive and magnetic encoders designed to meet your industrial automation needs.
Contact our sales team today
Get in contact with your local office to find out more information and speak to an expert.