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SEM-Raman system

SEM-Raman gives you comprehensive in situ sample characterisation in a single system. Redefine convenience, efficiency and productivity by combining these two technologies.

Renishaw's structural and chemical analyser (SCA) interface brings inVia's Raman point measurement and mapping capabilities to scanning electron microscopes (SEM).

Raman + SEM

inVia and the SCA interface provide an in-SEM analytical technique that both complements light microscope-based Raman spectroscopy and overcomes the limitations of energy-dispersive x-ray spectroscopy (EDS), the traditional in-SEM analytical technique. With Renishaw's SEM-Raman system, you'll benefit from co-located morphological, elemental, chemical, physical and electronic analysis.

Use the SEM to generate high-resolution images of your sample and perform elemental analysis. Add the power of Raman to obtain chemical information and images. Identify materials and non-metals, even when they have the same stoichiometry.

The SCA and inVia are fully compatible with not only Raman but also photoluminescence (PL) and cathodoluminescence (CL) spectroscopies.

One combined system for co-located analysis

With one combined system, you save valuable time. You do not have to move your samples between two instruments and risk analysing the wrong sample region.

Both the inVia and SEM can be operated as stand-alone systems, at the same time, without compromising the performance of either. You have a Raman system, a SEM system and a combined Raman-SEM system.

SEM-Raman imaging

You can determine the spatial variations in stress/strain and characterise defects by using the SEM-SCAs optional in-SEM mapping stage. With this you can image the molecular and crystalline properties of complex materials.

Same place, same time

Have confidence in your data; simultaneously acquire Raman and SEM data from the same point on the sample without having to move it. This ensures analysis is rapid and that your data are representative.

Choose the best system

Renishaw's SCA interface can be added to your existing SEM. It is mounted on a port, so it does not require the SEM to be modified in any way. The SCA has been installed on SEMs from all major vendors, including:

  • Zeiss
  • Thermo Fisher Scientific (FEI)
  • JEOL
  • Hitachi

Find out more

Download a product note

  • Product note:  Co-located SEM-Raman imaging system Product note: Co-located SEM-Raman imaging system

    Renishaw’s SEM-Raman system provides truly co-located analysis Renishaw’s SEM-Raman system is unique. You can simultaneously acquire both SEM (scanning electron microscope) and Raman data from the same area on the sample. You do not have to transfer the sample to a different measurement location or instrument; this ensures rapid truly correlative analysis. You will avoid the sample registration issues that can occur when moving samples between measurement locations.


Selecting the best system

Contact Renishaw's SEM experts and discuss your specific requirements.

Latest SEM user stories

Geologists use Renishaw's Raman-in-SEM solution to probe the nanoworld

Researchers at BRGM (the French Geological Survey in Orleans, France) study the physical, chemical, and structural properties of minerals. They use a co-located SEM-Raman system from Renishaw to provide comprehensivein situsample characterisation.

Combining Raman microscopy with scanning electron microscopy (SEM) to study inorganic and mineral samples at the Geological Institute of Romania, Bucharest

The Geological Institute of Romania use Renishaw's structural and chemical analyser (SCA) interface to bring the Raman analysis capabilities of the inVia™ confocal Raman microscope to their scanning electron microscope (SEM).