Skip navigation

VIONiC™ encoder series

The VIONiC encoder series is Renishaw's highest performing incremental optical encoder. It provides direct digital position feedback with superior metrology, high operating speeds and excellent reliability. The VIONiC readhead integrates Renishaw's market proven filtering optics and advanced interpolation technology. This provides ultra-low Sub-Divisional Error (SDE), excellent dirt immunity, and eliminates the need for additional adaptors or separate interfaces.

Additionally, VIONiC readheads are compatible with a wide range of linear, partial arc and rotary scales, from low expansion ZeroMet™ scales, to highly accurate REXM rings. This makes the VIONiC series the encoder of choice for versatility and superior metrology.

Ultra-low Sub-Divisional Error (SDE)

Sub-Divisional Error (SDE) pictogram

The VIONiC encoder series integrates Renishaw's market-proven filtering optics and signal processing for superior metrology performance. Advanced interpolation technology delivers ultra-low Sub-Divisional Error (SDE) of typically < ±15 nm; the lowest of all Renishaw optical encoders.


High speed operation with fine resolution

Speed pictogram

The VIONiC readhead features an intelligent interpolation chip to give resolution as fine as 2.5 nm, offering high precision and repeatability in any application. The encoder is available with a maximum clock rate of 50 MHz and operates at speeds up to 12 m/s. Speeds of up to 3.63 m/s are possible at a resolution of 0.1 µm, ideal for maximising throughput in semiconductor manufacturing processes.


Advanced Diagnostic Tool

Optional ADT pictogram

VIONiC encoders are also designed with intuitive auto calibration mode, making them easy to install. An optional Advanced Diagnostic Tool ADTi-100 is available for real-time encoder data feedback during installation or for in-field diagnostics.

Find your VIONiC scale option

Linear

Scale type

Scale name

Accuracy

Scale pitch

Thermal expansion coefficient at 20 °C

Scale max length

Stainless steel tape with track option

RTLC20 FASTRACK scale

RTLC20 with optional FASTRACK

±5 µm/m

20 µm

10.1 ±0.2 µm/m/°C

Up to 10 m (> 10 m on request)

Narrow stainless steel tape scale

RKLC20 linear scale

RKLC20-S

±5 µm/m20 µm

Matched to substrate material when scale ends are fixed with end clamps

Up to 20 m (> 20 m on request)

ZeroMet spar

RELM RSLM scale

RELM/RELE±1 µm for up to 1 m, then ±1 µm/m20 µm 0.75 ±0.35 µm/m/°C Up to 1.5 m

Stainless steel spar

RELM RSLM scale

RSLM20/RSLE20/RSLC20

±1.5 µm up to 1 m, ±2.25 µm up to 2 m, ±3 µm up to 3 m, ±4 µm up to 5 m20 µm 10.1 ±0.2 µm/m/°C Up to 5 m

Partial arc

Scale type

Scale name

Accuracy

Scale pitch

Thermal expansion coefficient at 20 °C

Supplied length

Narrow stainless steel partial arc tape

RKLC partial arc scale

RKLC20-S


±5 µm/m

20 µm

Matched to substrate material when scale ends are fixed with end clamps


Up to 20 m (> 20 m on request)

Rotary

Scale type

Scale name

Accuracy (depending on ring diameter)

Scale pitch

Thermal expansion coefficient at 20 °C

Ring diameter

Stainless steel ring

RESM-REST scale


RESM20/REST20



Graduation accuracy: ±3.97 to ±0.38 arc seconds

20 µm

15.5 ±0.5 µm/m/°C

52 to 550 mm

Ultra-high accuracy stainless steel ring

REXM scale (scale page)
REXM20/REXT20

Installed accuracy:

(≥ 100 mm diameter) ±1 arc second
(75 mm diameter) ±1.5 arc seconds
(≤ 57 mm diameter) ±2 arc seconds

20 µm 15.5 ±0.5 µm/m/°C 52 to 417 mm

Optional Advanced Diagnostic Tool ADTi-100

Advanced Diagnostic Tool ADTi-100

The VIONiC encoder system is compatible with the Advanced Diagnostic Tool ADTi-100 and ADT View software. They provide comprehensive real-time encoder data feedback to aid more challenging installations and diagnostics. The intuitive software interface can be used for:

  • Remote calibration
  • Signal optimisation over the entire axis length
  • Readhead pitch indication
  • Limit and reference mark indication
  • Digital readout of encoder position (relative to the scale)
  • Monitoring the velocity against time graph
  • Exporting and saving data

Key features

Speed

Clocked output option (MHz)Maximum speed (m/s)Minimum edge separation* (ns)
D (5 μm)X (1 μm)Z (0.5 μm)W (0.2 μm)Y (0.1 μm)H (50 nm)M (40 nm)P (25 nm)I (20 nm)O (10 nm)Q (5 nm)R (2.5 nm)
501212127.253.631.811.450.9060.7250.3630.1810.09125.3
401212125.802.901.451.160.7250.5800.2900.1450.07331.8
2512129.063.631.810.9060.7250.4530.3630.1810.0910.04551.2
2012128.063.221.610.8060.6450.4030.3220.1610.0810.04057.7
121210.365.182.071.040.5180.4140.2590.2070.1040.0520.02690.2
10128.534.271.710.8500.4270.3410.2130.1710.0850.0430.021110
08126.913.451.380.6900.3450.2760.1730.1380.0690.0350.017136
06125.372.691.070.5400.2690.2150.1340.1070.0540.0270.013175
04123.631.810.7300.3600.1810.1450.0910.0730.0360.0180.009259
014.530.9100.4500.1800.0900.0450.0360.0230.0180.0090.0050.0021038

*For a readhead with a 1 m cable

Ultra-low Sub-Divisional Error (SDE)

Interpolated error – 10 error cycles

VIONiC™ Sub Divisional Error (SDE)


X-axis: Readhead position (mm)

Y-axis: Error (nm)