Case study: Laser interferometer error-proofs linear scale calibration (docx)

To achieve consistent sub-micron measurement accuracy, an automated line scale calibration system developed by the Standards and Calibration Laboratory (SCL) in Hong Kong made automatic error compensation a key design criteria. A Renishaw XL-80 laser interferometer and XC-80 compensator were used to successfully manage any sources of Abbe error, as well as changes in environmental conditions.