個案研究: 現代精密測控的關鍵 (docx)
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Language: 中文(繁體)
受惠人工智慧、5G 和物聯網等新技術的迅速發展,半導體的需求近年不斷擴大,設備商也紛紛加大投入開發新機型以應對精密先進製程的嚴苛挑戰。半導體製造核心設備包括光刻機雙工件台、晶圓級鍵合設備、雷射退火先進設備和 EFEM 等 … 設計精密,無論對核心零件的規格或是測控穩定性都有極嚴謹的要求。這個領域多年來被歐美日廠商壟斷,鮮有中國廠商有能力涉足其中。北京華卓精科科技股份有限公司(以下簡稱華卓精科)是中國從事精密製程核心設備的領導者,他們開發的半導體設備和運動平台採用 Renishaw 多款高性能光學尺系統,是半導體設備實現國產化的重要一員。
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