案例分析: XL-80激光干涉仪为线纹尺测量系统提供精准可靠的位置补偿解決方案 (pdf)
File size: 1.72 MB
Language: 中文(简体)
Part number: H-5650-3469
线纹尺 (Line scale) 一般由玻璃制成,表面上准确地刻有等间距平行线,通常配置在比长仪、显微镜、测量仪器等长度测量设备上,作为测量距离和行程精度的重要参考基准。测量线纹尺上的刻度距离需要高精度仪器,测量分辨率往往要求达到纳米级,任何微小的环境因素所造成的误差都会影响测量结果的准确性。附属于香港特別行政区政府创新科技署的标准及校正实验所 (SCL) 设计并制造了一台全新线纹尺测量系统,其采用雷尼绍XL-80激光干涉仪补偿测量过程中因测量机台架设位置偏移所导致的误差。
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