白皮书: 圆光栅的精度 (pdf)
File size: 1.37 MB
Language: 中文(简体)
许多现代自动化系统都需要精密的旋转运动,如旋转式计算机直接制版 (CTP) 预压机,机床A、B和C轴、表面贴装机、形状测量系统、晶圆处理和检测设备以及测角仪。不同的应用需要不同的光栅性能和特性组合,以优化其功能 — 有些对精度有要求,有些则要求重复性、高分辨率或低周期误差,以实现速度回路控制。选择能够在技术规格和功能之间实现最佳平衡的光栅极具挑战性,很少有光栅能够满足所有的要求。
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