Plane mirrors
Renishaw supplied plane mirrors are manufactured on a Zerodur® (or similar) substrate and have a hard oxide dielectric coating.
Summary plane mirror specification
| Local flatness |
< λ/10 over area 12 mm wide x 7 mm high |
| Total flatness |
λ/10 |
| Mirror coating |
Hard oxide dielectric |
| Reflectivity |
> 97% |
| Operating temperature |
0 °C to 40 °C |
| Cross section |
25 mm x 25 mm |
| Optical aperture |
60 mm to 300 mm (10 mm increments) |
Mirror mounts
To enable mirrors to be mounted and correctly aligned to the motion system, Renishaw can also provide adjustable mounts for use with mirrors up to 350 mm in length, which have a cross section of 25 mm x 25 mm.
These mounts provide up to ±2.5° yaw adjustment and ±1° pitch adjustment. (Actual adjustment range is dependent on mirror length.)
Renishaw supplied mirror mounts are not vacuum compatible.
Zerodur® is a registered trademark of Schott Glass Technologies Incorporated.
To complete an RLE interferometer system requires only one additional, external optical component fitted to the motion system. (When using the differential interferometer, optics are required on the motion system and a fixed reference point e.g. column or tool.)