 | Plane mirrors and mirror mountsTarget optics are an essential part of all RLE interferometer installation. RLE systems containing retroreflector configured RLD detector heads are supplied with the necessary retroreflector target optic(s). For plane mirror configured RLD detector heads, plane mirrors and suitable mirror mounts are required. Due to their custom configuration and dimensions, plane mirrors are special order items only. Alternatively, the data sheet below gives specifications to allow local customer sourcing. When using the differential interferometer, plane mirror targets are required on both the motion system and a fixed reference point e.g. column or tool. Plane mirrors
Summary plane mirror specification
Mirror mounts
These mounts provide up to ±2.5° yaw adjustment and ±1° pitch adjustment. (Actual adjustment range is dependent on mirror length.) Renishaw supplied mirror mounts are not vacuum compatible.
Zerodur® is a registered trademark of Schott Glass Technologies Incorporated. Documents
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Renishaw supplied plane mirrors are manufactured on a Zerodur® (or similar low expansion) substrate and have a hard oxide, dielectric coating. The following size mirrors are available from Renishaw:
To enable mirrors to be mounted and correctly aligned to the motion system, Renishaw can also provide adjustable mounts for use with mirrors up to 350 mm in length, which have a cross section of 25 mm x 25 mm.