Skip navigation

Interferometric laser encoders explained

A laser encoder system, also known as displacement measuring interferometer, adds a greater level of accuracy and precision to your measurement toolkit. Laser interferometry is a well-established method for measuring displacement with great accuracy.

Renishaw's interferometric laser encoder systems

Renishaw has been offering laser-based position feedback systems since 1994. Following the original HS10 long-range laser encoder, the RLE laser encoder series was introduced in 2001 to offer versatile position feedback for a range of motion control applications. RLE systems use a remote laser source and optical-fibre-linked detector heads to deliver enhanced metrology, reduced installation footprint and simplified installation and set-up. The systems are easily configurable to suit different optical arrangements and applications.

The next generation of RLE laser encoder systems was introduced in 2026, featuring enhanced laser frequency stability, modular plug-and-play architecture and intuitive configuration and diagnostics software.

RLE laser encoders are well established with global manufacturers of Defect Review Scanning Electron Microscope (DR-SEM) and Critical Dimension Scanning Electron Microscope (CD-SEM) metrology equipment, and many other semiconductor manufacturing processes. Discover more advantages to using Renishaw's laser encoders in our Why use an interferometric laser encoder article.

A range of accessories is available for RLE laser encoder systems, such as configuration and diagnostics software, and digital interpolation signal interfaces.

Michelson interferometer diagram


Want to know how it works?

Our How does interferometry work article explains the principles of laser interferometry and how it's used to achieve high-accuracy position feedback.

Read the article

Discover our range of interferometric laser encoders designed to meet your high-accuracy motion control needs.

 

Contact our sales team today

Get in contact with your local office to find out more information and speak to an expert.