Interferometric laser encoder downloads
Download data sheets, installation guides, application notes, CAD models and case studies about Renishaw interferometric laser encoders.
Data sheets
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Data sheet: RLU100 laser unit
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Data sheet: RLU200 laser unit
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Data sheet: RLU300 laser unit
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Data sheet: Differential interferometer (DI) detector heads
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Data sheet: Plane mirror interferometer (PMI) detector heads
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Data sheet: RPI30 parallel interface
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Data sheet: RPI31 parallel interface
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Data sheet: RLI20-P Panasonic interface
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Data sheet: Plane mirrors and mirror mounts
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Data sheet: 39 mm vacuum chamber window
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Data sheet: RMAP-3A multi-axis periscope
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Data sheet: RLE-RLU-AUX auxiliary interface
Installation guides & user guides
CAD models
- CAD model: Detector head cable for laser encoder systems RLE-CABLE30
- CAD model: Optical fibre for laser encoder systems RLE-FIBRE30
- CAD model: DI detector head for laser encoder systems RLE-RDI-LPH
- CAD model: RLU100 laser unit for laser encoder systems RLE-RLU100D
- CAD model: RLU200 laser unit for laser encoder systems RLE-RLU200D
- CAD model: RLU300 laser unit for laser encoder systems RLE-RLU300D
- CAD model: Auxiliary interface for laser encoder systems RLE-RLU-AUX
- CAD model: Horizontal brackets for RLU laser units RLE-RLU-HFX
- CAD model: Vertical brackets for RLU laser units RLE-RLU-VFX
- CAD model: PMI detector head RP0 0° RLE-RP0-LPH
- CAD model: PMI detector head RP90 90° RLE-RP9-LPH
- CAD model: 15 mm DI periscope assembly
- CAD model: Mirror mount kit
- CAD model: RLI20-P laser interface (Panasonic)
- CAD model: RMAP-3A Multi-axis periscope
Application notes
Case studies
RLE interferometer enhances performance of Raith's latest e-beam tool
Raith improved the accuracy of its VB300 e-beam lithography tool by integrating Renishaw's RLE laser interferometer system. The upgrade reduced vibration-related errors and achieved positioning accuracy of less than 3 nm.
Laser encoder improves accuracy of optical connector measurement
Yagishita Giken improved the accuracy of its optical connector inspection machine by integrating Renishaw's RLE laser encoder, replacing a more complex and less precise interferometry system. The upgrade simplified installation and improved positioning resolution tenfold, from 0.1 µm to 0.01 µm.
Encoders hold the key to ultra-accurate motion control
Aerotech uses Renishaw's interferometric laser encoders to minimise measurement uncertainty by placing the measurement point closer to the point of interest. This enables highly accurate motion control and helps the company meet demanding precision requirements across a range of advanced applications.
VAD Instrument chooses Renishaw encoders for motion platforms
VAD Instrument selected Renishaw RLE laser encoder systems for its vacuum-compatible motion platforms, enabling highly accurate position feedback in demanding semiconductor and flat-panel display manufacturing environments. The encoder systems deliver reliable performance under ultra-high vacuum conditions, with nanometre-level precision and improved motion control for advanced inspection and process equipment.
Renishaw encoders support the latest in DUKIN's CMM design
DUKIN uses Renishaw's ultra-high precision RLE laser encoders in its CMMs to provide highly accurate position feedback, helping to minimise measurement errors and maintain metrology performance. The laser encoder technology supports the company's most demanding inspection applications in industries such as aerospace, automotive, micro-electronics and flat-panel displays by delivering exceptional precision and system stability.
Discover our range of interferometric laser encoders designed to meet your high-accuracy motion control needs.
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