Ultra high vacuum (UHV) optical encoders

UHV encoders compatible with vacuum pressures as low as 10^-11 TORR. The RGH25F encoder system works with RGS20-S tape scale for both linear and partial arc applications. The RGH20F readhead works with the RESR angle encoder, to provide precision rotary feedback. The vacuum range is suitable for many applications including wafer handling/testing, scientific instruments, spectroscopy, vacuum inspection equipment and many more.

The RoHS compliant REF interface replaces the RGB and RGF series, bringing high-end SiGNUM™ performance and resolutions to 5 nm. Please note that the RGH25U readhead and RGB interface are now obsolete and have been replaced by the RGH25F and REF.

UHV readheads features and benefits

• Constructed from vacuum compatible materials and adhesives to give low outgassing rates and a clean RGA
• Bake-out temperature of 120°C
• Non-contact open optical system offers high speed, reliable operation with zero friction and zero wear
• Industry standard digital and analogue outputs with resolutions to 5 nm
• Low power consumption minimises heat dissipation
• Vented seals
• Adaptive electronics offer high accuracy, long-term reliability, and low cyclic error (<±50 nm)
• RFI shielded cable with vacuum compatible coated wiring

The UHV range