 | TONiC™ UHV vacuum compatible linear encoderThe TONiC UHV linear encoder readhead is compatible with Renishaw’s high-accuracy linear scales with IN-TRAC™ optical reference marks, including RELM Invar® and RSLM stainless steel spar scales. These encoder systems provide very high fidelity position feedback in ultra-high vacuum conditions.
High performance TONiC incremental readheadAll TONiC readheads use the latest generation of Renishaw's filtering optics, now optimised for ultra-low noise. The advanced optics design is further augmented by dynamic signal conditioning including auto gain control (AGC) and auto offset control (AOC). The results are output signals of exceptional purity, providing SDE of typically ±30 nm, noise (jitter) to 0.51 nm RMS and resolutions to 1 nm. All TONiC scales include the unique IN-TRAC optical reference mark, directly embedded into the incremental channel, facilitating automatic electronic phasing with the press of a button - a function that can therefore be carried out remotely. The IN-TRAC reference mark also has the benefit that it remains phased at all speeds and throughout the entire operating temperature range. High accuracy vacuum compatible scalesRELM Invar spars provide “zero” thermal expansion coefficient and total accuracy guaranteed better than ±1 µm on lengths up to 1130 mm. RSLM stainless steel scales offer very high accuracy combined with the convenience of tape scale and are now available in lengths up to 10 metres, making them particularly well-suited to longer length axes that demand uncompromised metrology. TONiC UHV readheads have been manufactured in dedicated clean conditions, using materials and adhesives specially selected for their low out-gassing rates. The product is then packed and sealed in a vacuum-compliant bag to ensure cleanliness is maintained. Residual gas analysis (RGA) test resultsThe entire system has been proven suitable for use in clean vacuum conditions, by independent residual gas analysis (RGA) testing. It is also suitable for bake-out at 120 degrees C for use in ultra-high vacuum. Typical applications include wafer handling, wafer inspection and scientific research. RGA spectrum results for TONiC ultra high vacuum (UHV) readhead
Click on the graph to enlarge Provisional test result: This RGA spectrum refers to a TONiC UHV readhead without a cable fitted. This file will be updated before the product is launched, to include an RGA spectrum for a TONiC readhead fitted with a UHV-compatible cable. IMPORTANT! The TONiC interface should be positioned outside the UHV environment. RGA spectrum results for RSLM stainless steel linear scale
Click on the graph to enlarge System Base Pressure 3 x 10-10 mbar. Invar® is a registered trademark of Arcelor Mittal BrochuresData sheets
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The TONiC UHV linear encoder readhead is compatible with Renishaw's high-accuracy linear scales with IN-TRAC™ optical reference marks, including RELM Invar® and RSLM stainless steel spar scales. These encoder systems provide very high fidelity position feedback in ultra-high vacuum conditions. Available since the second quarter of 2010, the TONiC UHV linear encoder is designed for semiconductor and scientific applications where high performance and reliability simply cannot be compromised..jpg)
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