 | | Ultra high vacuum (UHV) encoders
 UHV encoders compatible with vacuum pressures as low as 10-11 TORR. The RGH25F and RGH25U UHV readheads work with RGS20-S tape scale for both linear and partial arc applications. The RGH20F UHV readhead works with the RESR angle encoder, to provide precision rotary feedback. The vacuum range is suitable for many applications including wafer handling/testing, scientific instruments, spectroscopy, vacuum inspection equipment and many more.
UHV readheads features and benefits
- Constructed from vacuum compatible materials and adhesives to give low outgassing rates and a clean RGA
- Bake-out temperature of 120°C
- Non-contact open optical system offers high speed, reliable operation with zero friction and zero wear
- Industry standard digital and analogue outputs with resolutions to 10 nm
- Low power consumption minimises heat dissipation
- Vented seals
- Adaptive electronics offer high accuracy, long-term reliability, and low cyclic error (<±0.1 µm)
- Integral set-up LED enables quick and easy installation
- RFI shielded cable with vacuum compatible coated wiring
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