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Ultra high vacuum (UHV) optical encoders

Constructed from vacuum-compatible materials and adhesives to give low outgassing rates and proven clean RGA. Bake-out temperature of 120°C.

Non-contact open optical system offers high speed, reliable operation with zero friction and zero wear. Industry standard digital and analogue outputs with resolutions to 1 nm.

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UHV montageRenishaw UHV encoders are compatible with vacuum pressures as low as 10-11 TORR. The RGH25F UHV encoder system works with RGS20-S tape scale for both linear and partial arc applications. The RGH20F UHV readhead works with the RESR angle encoder, to provide precision rotary feedback. TONiC™ UHV linear encoders and TONiC™ UHV rotary encoders have been added to the range from the second quarter of 2010.

The vacuum range is suitable for many applications including wafer handling/testing, scientific instruments, spectroscopy, vacuum inspection equipment and many more.

UHV readheads features and benefits

  • Constructed from vacuum-compatible materials and adhesives to give low outgassing rates and proven clean RGA
  • Bake-out temperature of 120°C
  • Non-contact open optical system offers high speed, reliable operation with zero friction and zero wear
  • Industry standard digital and analogue outputs with resolutions to 1 nm
  • Low power consumption minimises heat dissipation
  • Vented seals
  • Adaptive electronics offer high accuracy, long-term reliability and low cyclic error (±50 nm for RGH25F UHV and RGH20F UHV, ±30 nm for TONiC UHV)
  • RFI shielded cable with vacuum compatible coated wiring
  • TONiC UHV encoder features optical reference mark

Find out more...

RGH25F UHV vacuum compatible linear encoder
RGH20F UHV vacuum compatible rotary (angle) encoder
TONiC UHV vacuum compatible linear encoder
TONiC UHV vacuum compatible rotary (angle) encoder

Notice of obsolescence

Please note that the RGH25U and RGH25 UHV readheads and RGB interface are now obsolete and have been replaced by the RGH25F, RGH25F UHV and REF interface respectively.

Data sheets

  • Data sheet: RGH25F encoder system [299kB] Data sheet: RGH25F encoder system

    Renishaw’s RGH25F offers all the benefits of the market leading RG2 non-contact linear encoder systems; patented filtering optical scheme, high contamination tolerance and high speed.

  • Data sheet: RGH25F UHV, RGH20F UHV [328kB] Data sheet: RGH25F UHV, RGH20F UHV

    Renishaw’s vacuum compatible optical encoders offer all the benefits of the established RG2 linear and angle encoder systems; non-contact patented filtering optical scheme, high accuracy and high speed.

  • Data sheet: RGH20 series readhead [316kB] Data sheet: RGH20 series readhead

    The RGH20 is a compact readhead for use with Renishaw’s range of 20 μm RESR rotary encoders and RSLR high accuracy linear scale

Articles

  • News article: Renishaw scales facilitate micro-machining research [123kB] News article: Renishaw scales facilitate micro-machining research

    Special equipment has recently been installed at the University of Southampton by Ionoptika Ltd., for research into one of the most demanding of applications; micro-machining. Among the highly specialised suppliers involved is Renishaw, whose RG2 scale and RGH25 UHV readheads provide the crucial means of positioning for the nanometric movements required. People outside this discipline often find it hard to comprehend just how minute such work is – for example, Ionoptika’s full company logo can be etched 20 μm wide on a typical metallic screen mask.

Next steps

Contact us online if you require more information or you have a pricing query, or alternatively you may like to speak directly to your local Renishaw office.