Ultra high vacuum (UHV) optical encoders
Constructed from vacuum-compatible materials and adhesives to give low outgassing rates and proven clean RGA. Bake-out temperature of 120 °C.
Non-contact open optical system offers high speed, reliable operation with zero friction and zero wear. Industry standard digital and analogue outputs with resolutions to 1 nm.
Renishaw UHV encoders are compatible with vacuum pressures as low as 10-11 TORR. The RGH25F UHV encoder system works with RGS20-S tape scale for both linear and partial arc applications. The RGH20F UHV readhead works with the RESR angle encoder, to provide precision rotary feedback. TONiC™ UHV linear encoders and TONiC™ UHV rotary encoders have been added to the range from the second quarter of 2010.
The vacuum range is suitable for many applications including wafer handling / testing, scientific instruments, spectroscopy, vacuum inspection equipment and many more. Our RESOLUTE UHV video gives more industry specific information on the product. Video: RESOLUTE UHV (Ultra-High Vacuum) true-absolute optical encoder
What our UHV range can do for you
Increases throughput and yield
Reduces risk of damage
UHV readheads features and benefits
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Notice of obsolescencePlease note that the RGH25U and RGH25 UHV readheads and RGB interface are now obsolete and have been replaced by the RGH25F, RGH25F UHV and REF interface respectively.