Laser interferometer error-proofs linear scale calibration

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• Case study: Laser interferometer error-proofs linear scale calibration [794kB]
  

  Case study: Laser interferometer error-proofs linear scale calibration

  To achieve consistent sub-micron measurement accuracy, an automated line scale calibration system developed by the Standards and Calibration Laboratory (SCL) in Hong Kong made automatic error compensation a key design criteria. A Renishaw XL-80 laser interferometer and XC-80 compensator were used to successfully manage any sources of Abbe error, as well as changes in environmental conditions.

  [794kB]
• Case study: Laser interferometer error-proofs linear scale calibration [107kB]

  Case study: Laser interferometer error-proofs linear scale calibration

  To achieve consistent sub-micron measurement accuracy, an automated line scale calibration system developed by the Standards and Calibration Laboratory (SCL) in Hong Kong made automatic error compensation a key design criteria. A Renishaw XL-80 laser interferometer and XC-80 compensator were used to successfully manage any sources of Abbe error, as well as changes in environmental conditions.

  [107kB]
• Linear scale set-up with XL-80 interferometer [2.6MB]
  

  Linear scale set-up with XL-80 interferometer

  No description available

  [4032 x 3024] [2.6MB]
• Calibrating a 500 mm glass scale [3.1MB]
  

  Calibrating a 500 mm glass scale

  No description available

  [4032 x 3024] [3.1MB]
• Schematic of the measurement set-up [110kB]
  

  Schematic of the measurement set-up

  No description available

  [1000 x 450] [110kB]