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Laser interferometer error-proofs linear scale calibration

July 2019

To achieve consistent sub-micron measurement accuracy, an automated line scale calibration system developed by the Standards and Calibration Laboratory (SCL) in Hong Kong made automatic error compensation a key design criteria. A Renishaw XL-80 laser interferometer and XC-80 compensator were used to successfully manage any sources of Abbe error, as well as changes in environmental conditions.

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