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Pick up routines

Pick up routine - SM25 scanning modules and TM25-20 adaptor module

Move description
X -axis (mm)*
Y-axis (mm)*
Z-axis (mm)*
Clearance position
[dat_MOD_port(n)]
[dat_MOD_port(n)] - 30 mm
[dat_MOD_port(n)] + 8 mm
Enter port
no change
[dat_MOD_port(n)]
no change
Towards module
no change
no change
[dat_MOD_port(n)] + 3 mm
Attach module(s)
no change
no change
[dat_MOD_port(n)]
Exit port
no change
[dat_MOD_port(n)] - 30 mmno change

NOTE: To ensure optimum metrology performance it is recommended that following any module change the probe head is unlocked and then relocked.

Pick up routine - SH25 stylus holders

Move description

X-axis (mm)*

Y-axis (mm)*

Z-axis (mm)*

Clearance position

[dat_SH_port(n)]

[dat_SH_port(n)] - 30 mm

[dat_SH_port(n)] + 8 mm

Enter port

no change

[dat_SH_port(n)]

no change

Towards stylus holder(s)

no change

[dat_SH_port(n)]

[dat_SH_port(n)] + 3 mm

Attach stylus holder(s)

no change

[dat_SH_port(n)]

[dat_SH_port(n)]

Exit port

no change

[dat_MOD_port(n)] - 30 mm

no change

Pick up routine - TP20 module

Move description

X-axis (mm)*

Y-axis (mm)*

Z-axis (mm)*

Clearance position

[dat_TP20_port(n)]

[dat_TP20_port(n)] - 30 mm

** [dat_TP20_port(n)] + 6 mm

Enter port

no change

[dat_TP20_port(n)]

no change

Towards TP20 module

no change

[dat_TP20_port(n)]

**[dat_MOD_port(n)] + 3 mm

Attach TP20 module(s)

no change

[dat_TP20_port(n)]

**[dat_MOD_port(n)]

Exit port

no change

[dat_TP20_port(n)] - 30 mm

no change

* Coordinates assume aligned with Y-axis as per FCR25 mounting instructions

** Calculate nominal 'Z' docking position according to the stylus length used (see calculation formula in section Establishing the docking position for SH25 stylus holders).