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Put down routines

Put down routine - SM25 scanning modules and TM25-20 adaptor module

Move description

X-axis (mm)*

Y-axis (mm)*

Z-axis (mm)*

Clearance position

[dat_MOD_port(n)]

[dat_MOD_port(n)] - 30 mm

[dat_MOD_port(n)]

Enter port

no change

[dat_MOD_port(n)]

no change

Detach module

no change

no change

[dat_MOD_port(n)] + 3 mm

Clear of module

no change

no change

[dat_MOD_port(n)] + 8 mm

Exit port

no change

[dat_MOD_port(n)] - 30 mm

no change

NOTE: To ensure optimum metrology performance it is recommended that following any module change the probe head is unlocked and then relocked.

Put down routine - SH25 stylus holders

Move description

X-axis (mm)*

Y-axis (mm)*

Z-axis (mm)*

Clearance position

[dat_SH_port(n)]

[dat_SH_port(n)] - 30 mm

[dat_SH_port(n)]

Enter port

no change

[dat_SH_port(n)]

no change

Detach stylus holder(s)

no change

no change

[dat_SH_port(n)] + 3 mm

Clear of module

no change

no change

[dat_SH_port(n)] + 8 mm

Exit port

no change

[dat_SH_port(n)] - 30 mm

no change

Put down routine - TP20 module

Move description

X-axis (mm)*

Y-axis (mm)*

Z-axis (mm)*

Clearance position

[dat_TP20_port(n)]

[dat_TP20_port(n)] - 30 mm

** [dat_TP20_port(n)]

Enter port

no change

[dat_TP20_port(n)]

no change

Detach TP20 module

no change

no change

**[dat_MOD_port(n)] + 3 mm

Clear of module(s)

no change

no change

** [dat_MOD_port(n)] + 8 mm

Exit port

no change

[dat_TP20_port(n)] - 30 mm

no change

* Coordinates assume aligned with Y-axis as per FCR25 mounting instructions

** Calculate nominal 'Z' docking position according to the stylus length used (see calculation formula in section Establishing the docking position for SH25 stylus holders).