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TONiC™ UHV incremental encoder system with RKLC20-S linear scale

Features

  • Readhead size: 35 x 13.5 x 10 mm
  • Resolutions to 1 nm
  • Speed up to 10 m/s
  • Analogue or digital outputs
  • Ultra-low Sub-Divisional Error (SDE): typically <±30 nm
  • Customer-selectable optical IN-TRAC™ reference mark

Benefits

  • Ultra-High Vacuum (UHV)
  • Narrow 6 mm wide scale suitable for space constrained applications
  • Substrate mastered scale giving improved metrological performance
  • Super-compact encoder with dynamic signal conditioning for improved motion control
  • Cut to length convenience
  • High dirt and solvent immunity
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What is TONiC UHV?

TONiC UHV brings Renishaw's super-compact, non-contact encoder system to Ultra-High Vacuum applications offering customers improved motion control.

TONiC offers speeds up to 10 m/s and, combined with the Ti interface, resolutions down to 1 nm for both linear and rotary applications. TONiC systems are quick and simple to install with wide set-up tolerances and calibration at the push of a button. TONiC's dynamic signal processing gives improved signal stability with ultra-low Sub-Divisional Error of typically <±30 nm to help realise superior motion control performance.

What is RKLC20-S scale?

RKLC20-S is a narrow, low profile stainless steel tape scale featuring 20 µm pitch incremental graduations and IN-TRAC customer selectable reference marks. It is accurate to ±5 µm/m and available in lengths up to 20 metres (>20 m on request). The RKLC20-S is mastered to the machine substrate giving improved metrological performance when the scale ends are rigidly fixed to the substrate.

Why choose this encoder system?

Ultra-High Vacuum (UHV)

TONiC UHV readheads take standard TONiC outstanding performance and deliver it in a readhead that has been designed and constructed using UHV compatible materials and processes making it suitable for UHV conditions down to 10-10 Torr.

The range of TONiC UHV encoders and accessories are constructed from vacuum-compatible materials and adhesives to give low outgassing rates and proven clean residual gas analysis (RGA) making them suitable for many applications including wafer handling / testing, scientific instruments, spectroscopy, vacuum inspection equipment and many more.

Ultimate reliability and performance in a compact size

For ultimate reliability, consistent performance and high dirt immunity, TONiC readheads incorporate third-generation filtering optics, tuned for even lower noise (jitter) and now further enhanced by dynamic signal processing including Auto Gain Control and Auto Offset Control. This combination – all incorporated inside the readhead - provides signals of unrivalled purity and ultra-low Sub-Divisional Error of typically <±30 nm. The result is smoother velocity control for improved scanning performance and increased positional stability; essential parameters for so many applications, all in a compact readhead.

Narrow, robust and versatile scale

RKLC is a robust, 6 mm wide stainless steel encoder tape scale with a thickness of 0.15 mm. This allows the scale, when rigidly fixed to a machine axis, to become ‘mastered' to the machine substrate, matching its thermal expansion coefficient and behaviour. Differential movement between the scale and the machine is thus minimised.

Index positions are provided by IN-TRAC optical reference marks which are directly embedded into the incremental scale markings to enable auto‑phasing. This compact scale design facilitates encoder installation in space constrained applications.
RKLC tape scale also combines ±5 µm/m accuracy with the mechanical and chemical ruggedness of stainless steel, easy coiling and 'cut to length' convenience.

Interface options

TD (dual resolution) interface

  • Selectable dual-resolutions quadrature output. Ti interface (square)
  • Ideal for applications that require high speed movement combined with finer precision motion.

DOP (dual output) interface

  • Provides simultaneous digital quadrature and 1 Vpp signals.
  • Designed for applications requiring one or more operations to be synchronised with a motion axis.TONiC Dual Output (DOP) interface

Optional diagnostic kit

TONiC™ diagnostic kit (software and hardware)

TONiC diagnostic software can be used to optimise the installation of TONiC encoders and provide a quick and comprehensive system calibration. The software must be used in conjunction with the TONiC diagnostic hardware which can be purchased from Renishaw using part number A-9411-0011. The hardware is connected to the PC via the USB cable (provided in the kit) or in-line with the customers' electronics.

Find out all about the TONiC diagnostic kit.

Technical specifications

Measuring standard

Narrow stainless steel tape scale with self-adhesive backing tape, for mounting directly to a substrate

Readhead size (LxWxH)

35 mm x 13.5 mm x 10 mm

Scale pitch

20 μm

Coefficient of thermal expansion

Matched to substrate material when scale ends are fixed with end clamps

Accuracy grade at 20 °C

±5 μm/m

Reference mark

IN-TRAC reference marks directly embedded in the RKLC-S

Selector magnet used to identify chosen reference marks

Limit switches

Dual or single limits (select at time of order)

Scale length

Up to 20 m (>20 m on request)

Scale form (H x W)0.15 mm x 6 mm including adhesive

Maximum speed

Analogue

Digital

(See data sheet for details)

Up to 10 m/s at -3 dB

Up to 10 m/s

Sub-Divisional Error (SDE)

Typically <±30 nm

Dynamic signal control

Real time signal conditioning including Auto Gain Control (AGC) and Auto Offset Control (AOC) for optimised performance during operation

Incremental signals

Analogue

Digital


1 Vpp (20 μm period)

Resolutions from 5 μm to 1 nm

Electrical connection

0.5 m, 1 m, 1.5 m, 3 m, 5 m and 10 m cable lengths with mini connector (connects direct to TONiC interface)

Power supply

5 V ±10%, <100 mA (analogue system), <200 mA (digital systems) (unterminated)

Vibration (operating)

100 m/ s2 max @ 55 Hz to 2 000 Hz

Shock (non-operating)

500 m/s2, 11 ms, ½ sine, 3 axes

Operating temperature (system)

0 °C to +70 °C

Bake-out temperature (non-operating)120 °C (Readhead and scale only)

Sealing

Readhead: IP20

Interface: IP20

Cable constructionTinned copper braided single screen, FEP core insulation

Refer to data sheets for full details.

Downloads

Data sheets

Software

  • TONiC™ diagnostic software version 1.0

How it works

TONiC features the third generation of Renishaw's unique filtering optics that average the contributions from many scale periods and effectively filter out non-periodic features such as dirt. The nominally square-wave scale pattern is also filtered to leave a pure sinusoidal fringe field at the detector. Here, a multiple finger structure is employed, fine enough to produce photocurrents in the form of four symmetrically phased signals. These are combined to remove DC components and produce sine and cosine signal outputs with high spectral purity and low offset while maintaining bandwidth to beyond 500 kHz.

Fully integrated advanced dynamic signal conditioning, Auto Gain , Auto Balance and Auto Offset Controls combine to ensure ultra-low Sub- Divisional Error (SDE) of typically <±30 nm.

This evolution of filtering optics, combined with carefully-selected electronics, provide incremental signals with wide bandwidth achieving a maximum speed of 10 m/s with the lowest positional jitter (noise) of any encoder in its class. Interpolation is by CORDIC algorithm within the TONiC Ti interface, with fine resolution versions being further augmented by additional noise-reducing electronics to achieve jitter of just 0.5 nm RMS.

TONiC™ optical scheme with annotations

The IN-TRAC reference mark is fully-integrated in the incremental scale and is detected by a split photodetector within the readhead. As the diagram shows, the reference mark split detector is embedded directly into the centre of the incremental channel linear photodiode array ensuring greater immunity from yaw-dephasing. Yielding a reference mark output that is bi-directionally repeatable to unit of resolution at all speeds. This unique arrangement also benefits from an automatic calibration routine that electronically phases the reference mark and optimises the dynamic signal conditioning