VIONiC™ encoder series
The VIONiC encoder series is Renishaw's highest performing incremental optical encoder. It provides direct digital position feedback with superior metrology, high operating speeds and excellent reliability. The VIONiC readhead integrates Renishaw's market proven filtering optics and advanced interpolation technology. This provides ultra-low Sub-Divisional Error (SDE), excellent dirt immunity, and eliminates the need for additional adaptors or separate interfaces.
Additionally, VIONiC readheads are compatible with a wide range of linear, partial arc and rotary scales, from low expansion ZeroMet™ scales, to highly accurate REXM rings. This makes the VIONiC series the encoder of choice for versatility and superior metrology.
Ultra-low Sub-Divisional Error (SDE)
The VIONiC encoder series integrates Renishaw's market-proven filtering optics and signal processing for superior metrology performance. Advanced interpolation technology delivers ultra-low Sub-Divisional Error (SDE) of typically < ±15 nm; the lowest of all Renishaw optical encoders.
High speed operation with fine resolution
The VIONiC readhead features an intelligent interpolation chip to give resolution as fine as 2.5 nm, offering high precision and repeatability in any application. The encoder is available with a maximum clock rate of 50 MHz and operates at speeds up to 12 m/s. Speeds of up to 3.63 m/s are possible at a resolution of 0.1 µm, ideal for maximising throughput in semiconductor manufacturing processes.
Advanced Diagnostic Tool
VIONiC encoders are also designed with intuitive auto calibration mode, making them easy to install. An optional Advanced Diagnostic Tool ADTi-100 is available for real-time encoder data feedback during installation or for in-field diagnostics.
Find your VIONiC scale option
Linear
Scale type | Scale name | Accuracy | Scale pitch | Thermal expansion coefficient at 20 °C | Scale max length |
Stainless steel tape with track option
| ±5 µm/m | 20 µm | 10.1 ±0.2 µm/m/°C | Up to 10 m (> 10 m on request) | |
Narrow stainless steel tape scale
| ±5 µm/m | 20 µm | Matched to substrate material when scale ends are fixed with end clamps | Up to 20 m (> 20 m on request) | |
ZeroMet spar
| RELM/RELE | ±1 µm for up to 1 m, then ±1 µm/m | 20 µm | 0.75 ±0.35 µm/m/°C | Up to 1.5 m |
Stainless steel spar
| ±1.5 µm up to 1 m, ±2.25 µm up to 2 m, ±3 µm up to 3 m, ±4 µm up to 5 m | 20 µm | 10.1 ±0.2 µm/m/°C | Up to 5 m |
Partial arc
Scale type | Scale name | Accuracy | Scale pitch | Thermal expansion coefficient at 20 °C | Supplied length |
Narrow stainless steel partial arc tape
| ±5 µm/m | 20 µm | Matched to substrate material when scale ends are fixed with end clamps | Up to 20 m (> 20 m on request) |
Rotary
Scale type | Scale name | Accuracy (depending on ring diameter) | Scale pitch | Thermal expansion coefficient at 20 °C | Ring diameter |
Stainless steel ring  | Graduation accuracy: ±3.97 to ±0.38 arc seconds | 20 µm | 15.5 ±0.5 µm/m/°C | 52 to 550 mm | |
Ultra-high accuracy stainless steel ring  | REXM20/REXT20 | Installed accuracy: (≥ 100 mm diameter) ±1 arc second | 20 µm | 15.5 ±0.5 µm/m/°C | 52 to 417 mm |
Optional Advanced Diagnostic Tool ADTi-100
The VIONiC encoder system is compatible with the Advanced Diagnostic Tool ADTi-100 and ADT View software. They provide comprehensive real-time encoder data feedback to aid more challenging installations and diagnostics. The intuitive software interface can be used for:
- Remote calibration
- Signal optimisation over the entire axis length
- Readhead pitch indication
- Limit and reference mark indication
- Digital readout of encoder position (relative to the scale)
- Monitoring the velocity against time graph
- Exporting and saving data
Key features
Speed
| Clocked output option (MHz) | Maximum speed (m/s) | Minimum edge separation* (ns) | |||||||||||
| D (5 μm) | X (1 μm) | Z (0.5 μm) | W (0.2 μm) | Y (0.1 μm) | H (50 nm) | M (40 nm) | P (25 nm) | I (20 nm) | O (10 nm) | Q (5 nm) | R (2.5 nm) | ||
| 50 | 12 | 12 | 12 | 7.25 | 3.63 | 1.81 | 1.45 | 0.906 | 0.725 | 0.363 | 0.181 | 0.091 | 25.3 |
| 40 | 12 | 12 | 12 | 5.80 | 2.90 | 1.45 | 1.16 | 0.725 | 0.580 | 0.290 | 0.145 | 0.073 | 31.8 |
| 25 | 12 | 12 | 9.06 | 3.63 | 1.81 | 0.906 | 0.725 | 0.453 | 0.363 | 0.181 | 0.091 | 0.045 | 51.2 |
| 20 | 12 | 12 | 8.06 | 3.22 | 1.61 | 0.806 | 0.645 | 0.403 | 0.322 | 0.161 | 0.081 | 0.040 | 57.7 |
| 12 | 12 | 10.36 | 5.18 | 2.07 | 1.04 | 0.518 | 0.414 | 0.259 | 0.207 | 0.104 | 0.052 | 0.026 | 90.2 |
| 10 | 12 | 8.53 | 4.27 | 1.71 | 0.850 | 0.427 | 0.341 | 0.213 | 0.171 | 0.085 | 0.043 | 0.021 | 110 |
| 08 | 12 | 6.91 | 3.45 | 1.38 | 0.690 | 0.345 | 0.276 | 0.173 | 0.138 | 0.069 | 0.035 | 0.017 | 136 |
| 06 | 12 | 5.37 | 2.69 | 1.07 | 0.540 | 0.269 | 0.215 | 0.134 | 0.107 | 0.054 | 0.027 | 0.013 | 175 |
| 04 | 12 | 3.63 | 1.81 | 0.730 | 0.360 | 0.181 | 0.145 | 0.091 | 0.073 | 0.036 | 0.018 | 0.009 | 259 |
| 01 | 4.53 | 0.910 | 0.450 | 0.180 | 0.090 | 0.045 | 0.036 | 0.023 | 0.018 | 0.009 | 0.005 | 0.002 | 1038 |
*For a readhead with a 1 m cable
Ultra-low Sub-Divisional Error (SDE)
Interpolated error – 10 error cycles
X-axis: Readhead position (mm)
Y-axis: Error (nm)