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TONiC™ UHV incremental encoder system with RESM20 rotary (angle) ring

Features

  • Readhead size: 35 x 13.5 x 10 mm
  • Resolutions to 1 nm
  • Speed up to 3 673 rpm
  • Ultra low Sub-Divisional Error (SDE): typically < ±30 nm
  • Optical IN-TRAC™ reference mark

Benefits

  • Ultra-High Vacuum (UHV)
  • Low profile ring with large internal diameter for easy integration
  • Super-compact encoder readhead with dynamic signal conditioning for improved motion control
  • Diagnostic kit to assist challenging installations and aid system optimisation
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What is TONiC UHV?

TONiC UHV brings Renishaw's compact, non-contact encoder system to Ultra-High Vacuum applications offering customers improved motion control.

TONiC offers speeds up to 10 m/s and, combined with the Ti interface, resolutions down to 1 nm for both linear and rotary applications. TONiC systems are quick and simple to install with wide set-up tolerances and calibration at the push of a button. TONiC's dynamic signal processing gives improved signal stability with ultra-low Sub-Divisional Error of typically < ±30 nm to help realise superior motion control performance.

What is RESM20 ring?

RESM20 is a one-piece stainless steel ring with 20 µm pitch graduations marked directly on the periphery, featuring the IN-TRAC™ optical reference mark. Two versions are available in a wide range of sizes (Ø52 mm to Ø550 mm). ‘A' section rings, which offer an impressive installed accuracy and feature a taper mount system which reduces the need for highly toleranced machined parts and eliminates eccentricity. ‘B' section thin rings, which are low inertia and mass, are also available. Both 'A' and 'B' section rings have a large internal diameter for flexible integration into UHV applications. The non-contact format eliminates backlash, shaft wind-up (torsion) and other mechanical hysteresis errors that are inherent in traditional enclosed encoders.

Why choose this encoder system?

Ultra-High Vacuum (UHV)

TONiC UHV readheads take standard TONiC outstanding performance and deliver it in a readhead that has been designed and constructed using UHV compatible materials and processes making it suitable for UHV conditions down to 10 -10 Torr.
The range of TONiC UHV encoders and accessories are constructed from vacuum-compatible materials and adhesives to give low outgassing rates and proven clean residual gas analysis (RGA) making them suitable for many applications including wafer handling / testing, scientific instruments, spectroscopy, vacuum inspection equipment and many more.

Exceptional metrology

The TONiC encoder features Renishaw's market-proven filtering optics and advanced signal processing. Auto Gain Control (AGC) and Auto Offset Control (AOC) technologies reduce analogue signal noise and digital jitter within the readhead.

TONiC encoders deliver exceptionally low signal output jitter of <±0.5 nm RMS and low Sub-Divisional Error (SDE) of <±30 nm, enabling systems to hold position better and generate less heat in linear motor applications. Low jitter also enables smoother velocity control in high-precision applications operating at low speeds.

Flexible configuration

The TONiC series offers a variety of external interfaces that can be configured to meet the speed and resolution requirements of the application. With late-stage integration and configuration of the external interface, one versatile TONiC readhead offers many options for end user customisation.

TONiC interface options enable digital, analogue, or dual output of both digital and analogue signals. The TD (dual resolution) interface offers selectable dual-resolution output, and a DPI interface is also available for wide-format printing applications. The flexibility of TONiC encoder configuration allows OEMs to benefit from superior motion control and high throughput in a wide range of applications.

Interface options

TD (dual resolution) interface

  • Selectable dual-resolutions quadrature output.
  • Ideal for applications that require high speed movement combined with finer precision motion.
Ti interface (square)

DOP (dual output) interface

  • Provides simultaneous digital quadrature and 1 Vpp signals.
  • Designed for applications requiring one or more operations to be synchronised with a motion axis.TONiC Dual Output (DOP) interface

DSi (Dual Signal interface)

  • Renishaw's DSi combines the incremental signals from two TONiC readheads on a RESM20 ring (REST20 ring for partial rotation applications) to compensate for the effect of bearing wander and eliminates odd error harmonics, including eccentricity to give total l installed accuracy of typically ±2.0 arc second.TONiC Dual Signal interface with RESM rotary ring

Optional diagnostic kit

TONiC™ diagnostic kit (software and hardware)

TONiC diagnostic software can be used to optimise the installation of TONiC encoders and provide a quick and comprehensive system calibration. The software must be used in conjunction with the TONiC diagnostic hardware which can be purchased from Renishaw using part number A-9411-0011. The hardware is connected to the PC via the USB cable (provided in the kit) or in-line with the customers' electronics.

Find out all about the TONiC diagnostic kit.

Technical specifications

Measuring standard

RESM20: one-piece low profile stainless steel ring. Standard ‘A' section with tapered internal diameter or low inertia ‘B' section

Also available for partial rotation applications as REST20

Readhead size (LxHxW)

35 mm x 13.5 mm x 10 mm

Scale pitch

20 μm

Coefficient of thermal expansion at 20 °C15.5 ±0.5 μm/m/°C

Ring outer diameter

52 mm to 550 mm. For larger custom sizes, contact Renishaw

Line count

8 192 to 86 400 (depending on ring size)

Reference mark

RESM20: single IN-TRAC reference mark ring

REST20: two reference mark ring for partial rotation applications

Accuracy*

Graduation accuracy

System accuracy


±3.97 to ±0.38 arc seconds (depending on ring diameter)

±4.20 to ±0.40 arc seconds (depending on ring diameter)

Maximum speed

Analogue

Digital

(See data sheet for details)

3 673 rpm at -3 dB (on 52 mm RESM20)

3 673 rpm (5 μm resolution TONiC on 52 mm RESM20)

Sub-Divisional Error (SDE)

Typically < ±30 nm

Dynamic signal control

Real time signal conditioning including Auto Gain Control (AGC) and Auto Offset Control (AOC) for optimised performance during operation

Incremental signals

Analogue

Digital

(See data sheet for details of angular resolutions)

1 Vpp (20 μm period)

Resolution from 5 μm to 1 nm

Electrical connection

0.5 m, 1 m, 1.5 m, 3 m, 5 m and 10 m cable lengths with mini connector (connects direct to TONiC interface)

Power supply

5 V ±10%, < 100 mA (analogue system), < 200 mA (digital systems) (unterminated)

Readhead power consumption< 100 mA

Vibration (operating)

100 m/s2 max @ 55 Hz to 2 000 Hz

Shock (non-operating)

1 000 m/s2, 6 ms, ½ sine

Operating temperature (system)

0 °C to +70 °C

Bake-out temperature (non-operating)

120 °C (Readhead and scale only)

Sealing

Readhead: IP20

Interface: IP20

Cable construction

Tinned copper braided single screen, FEP core insulation


* System accuracy is graduation error plus SDE. Graduation accuracy is the maximum difference between the angle measured by a single readhead and the true rotation of the encoder as graduated. Application disturbances such as eccentricity are not included.

Refer to data sheets for full details.