ニュースリリース： 精度を新たな高みへ―レニショー光学式エンコーダを搭載したエアベアリングステージ (docx)
File size: 55 kB
Language: 日本語
半導体、ソーラーパネル、精密加工といったハイエンド産業でエアベアリングが広く活用されている。
This type of file requires a viewer, freely available from Microsoft
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