应用说明： 工业控制环及其在光栅上的应用 (docx)
File size: 99 kB
Language: 中文（简体）
在整机设计环境下评估光栅性能时，控制环架构是一个重要的考虑因素。例如，有很多种方法可消除精密运动平台设计中导致平台稳定性变差并发生定位偏差的因素。本文阐述了雷尼绍RESOLUTE™绝对式光栅系统在此类应用中的潜力 — 传统上只有周期误差在1 nm范围内的超细栅距增量式光栅才可胜任此类要求。
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