データシート: RLD10 DI(ディファレンシャル干渉計)ディテクターヘッド (pdf)
File size: 282 kB
Language: 日本語
Part number: L-9904-2367
このデータシートでは、1 つの固定された参照用ミラーを含む 2 つの平面鏡の相対位置を測する RLD10-X3-DI ディファレンシャル干渉計ディテクターヘッドについて説明します。
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