运动平台在真空环境中的应用：超高真空 (UHV) 光栅助力提升稳定性 (docx)
File size: 527 kB
Language: 中文（简体）
在工业界有不少制程需要在真空环境下进行，许多高精密产品在制造过程中也必需使用程度不一的真空技术；产品最后在大气环境下使用。典型应用包括显示面板中薄膜和基板之间的精密贴合制程、半导体制程中的薄膜溅镀、晶圆检测等等。
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