적용 사례: VAD Instrument, 모션 플랫폼용으로 Renishaw의 UHV 옵티컬 엔코더 선택 (pdf)
File size: 1.13 MB
Language: 한국어
Part number: H-5650-0013
진공 기술은 다양한 고정밀 제조 공정에 사용됩니다. 일반적인 응용 분야로는 반도체 웨이퍼 검사, 웨이퍼 본딩, 포토리소그래피, 박막 증착 등이 있습니다.
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